Sweden – Laboratory, optical and precision equipments (excl. glasses) – Electron Beam Lithography (EBL) Tool

Lunds universitet · Lund, Sweden Closes in 30d

Buyer	Lunds universitet
Location	Lund, Sweden (NUTS SE224)
Contract type	Supplies
Procedure	Open procedure
Estimated value	SEK 26,000,000
Tender deadline	6 November 2026, 23:59 CET · 30 days left as of 7 October 2026
Published	7 October 2026
Main CPV	38000000 — Laboratory & optical equipment
Notice type	Contract notice
TED reference	690718-2026
Data checked	7 October 2026 against the official TED record

Summary

Lund University, Department of Physics, Lund Nano Lab is acquiring an Electron Beam Lithography Tool. The instrument is intended for high resolution, repeatable patterning, equipped with a large writing field for high throughput patterning, and automated self-calibration routines to support long exposures with minimal errors due to beam drift. Finally, its flexible sample loading system must be configured for a wide range of samples from small pieces used for basic science, or wafers up to 8" in diameter for pilot production testing. With these properties, the Electron Beam Lithography Tool will become a central part of the Lund Nano Lab fabrication infrastructure and support a range of applications such as quantum devices, high-power electronics, metasurfaces and more. In addition to the instrument, the tender must include all associated costs such as warranty, packaging, insurance,…

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How to bid

Open the official notice on TED (690718-2026) and download the procurement documents linked there — the full specification, award criteria and any lots.
Check you can take part: this is an open procedure for supplies, so review the selection criteria (turnover, references, certifications) before investing time.
Submit through the buyer's e-procurement portal before 6 November 2026, 23:59 CET. Late submissions are rejected automatically — set a reminder a week ahead for questions and a day ahead for upload.